JPH0564863B2 - - Google Patents

Info

Publication number
JPH0564863B2
JPH0564863B2 JP60065360A JP6536085A JPH0564863B2 JP H0564863 B2 JPH0564863 B2 JP H0564863B2 JP 60065360 A JP60065360 A JP 60065360A JP 6536085 A JP6536085 A JP 6536085A JP H0564863 B2 JPH0564863 B2 JP H0564863B2
Authority
JP
Japan
Prior art keywords
diffusion layer
bridge circuit
force sensor
silicon
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60065360A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61224465A (ja
Inventor
Kohei Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60065360A priority Critical patent/JPS61224465A/ja
Publication of JPS61224465A publication Critical patent/JPS61224465A/ja
Publication of JPH0564863B2 publication Critical patent/JPH0564863B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP60065360A 1985-03-29 1985-03-29 力センサ及びその製造方法 Granted JPS61224465A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60065360A JPS61224465A (ja) 1985-03-29 1985-03-29 力センサ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60065360A JPS61224465A (ja) 1985-03-29 1985-03-29 力センサ及びその製造方法

Publications (2)

Publication Number Publication Date
JPS61224465A JPS61224465A (ja) 1986-10-06
JPH0564863B2 true JPH0564863B2 (en]) 1993-09-16

Family

ID=13284714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60065360A Granted JPS61224465A (ja) 1985-03-29 1985-03-29 力センサ及びその製造方法

Country Status (1)

Country Link
JP (1) JPS61224465A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09160361A (ja) * 1995-12-06 1997-06-20 Nec Corp Ｅｐカートリッジ

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0821722B2 (ja) * 1985-10-08 1996-03-04 日本電装株式会社 半導体振動・加速度検出装置
US4912990A (en) * 1989-02-27 1990-04-03 Sundstrand Data Control, Inc. Magnetically driven vibrating beam force transducer
JP2002048661A (ja) * 2000-08-01 2002-02-15 Olympus Optical Co Ltd 力覚センサ
JP5867688B2 (ja) * 2011-09-22 2016-02-24 国立大学法人 東京大学 触覚センサ及び多軸触覚センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09160361A (ja) * 1995-12-06 1997-06-20 Nec Corp Ｅｐカートリッジ

Also Published As

Publication number Publication date
JPS61224465A (ja) 1986-10-06

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